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MEMSnet Home: MEMS-Talk: hard bake before HF
hard bake before HF
2004-01-06
[email protected]
2004-01-07
R. Brent Garber (2 parts)
2004-01-06
[email protected]
2004-01-08
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2004-01-09
Eric TANG Xiaosong
hard bake before HF
[email protected]
2004-01-06
hi all
can anyone plsease telll me what should be the ideal post bake(hard bake)
before HF
etching of silicon iam using PR-SR1813.
regards


Rajan Malik
Graduate Student
Electrical Engg.
University of south Florida


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