I have same problem! I have some e-beam cured PR, can only removed by hign
energy, high power oxygen plasma, but it etched slightly even my Si
substrate! Let me know if you find out how
----- Original Message -----
From: "sokwon Paik" 
To: 
Sent: Tuesday, January 06, 2004 12:18 AM
Subject: [mems-talk] Help! I could not remove S1818 on top of my design
layer


>
> I tried to remove s1818 layer after I deposited my
> designed layer. I used MF319 as I did always but it
> didn't removed s1818 layer clearly. I tried to use
> acetone to remove this s1818 layer but it failed.
> some remained s1818 layer covered my design layer.
> I tried to use shipley 1165 remover but it failed.
> I'm thinking of using RIE. But I'm afraid it could
> hurt the seed layer also.
>
> Anybody have any idea of removing this layer?
>
> If you let me know it then it would be very great.
>
> Thanks,
>
> Sokwon Paik
> Ph.D student
> Texas A&M University
>
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