Hi Iskandar,

You may be able to use our wafer bonder that includes in-situ IR alignment.
Give me a call if you want to discuss this further.

Regards

Tony

Tony Rogers
Applied Microengineering Ltd
173 Curie Avenue
Didcot
OX11 0QG
UK
Tel.: +44 (0)1235 833934
Fax: +44 (0)1235 833935
e-mail: [email protected]

Web:http://www.aml.co.uk

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of Iskandar
Sent: 07 January 2004 15:09
To: [email protected]
Subject: [mems-talk] Help with aligning two wafers


Hi all,

I was hoping someone could help me with aligning two Si wafers. Its to make
a micromotor whereby the wafers contain the rotor and stator respectively. I
was hoping that if the wafers were crystalline I could make pyramid holes in
each using anisotropic KOH etching and drop ruby balls between the two
wafers to align them. However this requires a film of Si Nitride on each
wafer, which is tedious considering many more features have to be laid out
as well.

Any help at all will be considered. The alignment preferebaly should be as
accurate as possible - however realistically the stator is about 1000um
(1mm) diameter so some error can be tolerated.

Thanks all for the help - ISSA
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