"Heat" is the reason for your Aluminum films color is white. reducing the
heat effect as you can.

----- Original Message -----
From: "Sachin Rane" 
To: 
Sent: Thursday, January 08, 2004 1:44 AM
Subject: [mems-talk] Aluminum evaporation issues


> Hi,
> I have been trying to make ~ 1-2 micron thick aluminum films by thermal
> evaporation. The films I get are typically white in color (non-shiny)
> and rough (inspected through AFM). I have used both the boron nitride
> crucible and tungsten boat as the source. The pressure at evaporation is
> typically 2*10^-6 (before starting evaporation it is < 10^-6 ) What is
> the problem? Or is thermal evaporation not a good method for this?
> Thanks
> SR
>
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