"Platen" is a synonym for wafer "chuck" or stage, so I would assume so.



Burkhard Volland  wrote:
Hello,

the phrase "platen power" is often used in context of ASE DRIE with ICP
equipment. As I understand,
"coil power" or "source power" is the power you feed into the coil to
maintain the discharge. "Rf power", "cathode power" or "bias power" are
synonyms for the power you feed into the cathode where the sample is placed,
in order to create a dc-bias that accelerates (positive) ions towards the
sample. Is "platen power" a synonym for "cathode power"?
Best regards,
Burkhard


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