MEMS-talk

News	MEMSnet Home: MEMS-Talk: Does Cl-containing plasma attack Mo? MEMS Strain guage 2004-01-12 Vivek P. Shankam Does Cl-containing plasma attack Mo? 2004-01-12 Isaac Wing Tak Chan problem: deep trenches during DRIE 2004-01-19 [email protected] 2004-01-19 Kirt Williams 2004-01-19 Tony Li 2004-01-12 Kirt Williams 2004-01-14 El Camino Tech 2004-01-13 Tomblin, Graham (OH32) 2004-01-13 Michael D Martin Does Cl-containing plasma attack Mo? Isaac Wing Tak Chan 2004-01-12 Dear all, Could someone tell me whether Cl-containing plasma attack Mo or not? If there is a reference that directly talk about that, would you please let me know? My goal is to have a plasma that would attack silicon, silicon nitride, and silicon oxide, but would not attack Mo, at least not by RIE. Would Cl-containing plasma achieve this purpose? I do not see any reference that talk about etching Mo with Cl-containing plasma. Thanks for your help. Yours sincerely, Isaac Chan Ph.D. Candidate Dept. Electrical & Computer Engineering University of Waterloo 200 University Ave. W Waterloo, Ontario, Canada N2L 3G1 Tel: (519) 888-4567, ext. 6014 Fax: (519) 746-6321 [email protected] http://www.ece.uwaterloo.ca/~a-sidic reply
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