Hi Melissa
Why don´t you ask STS in UK directly?
As far as I understand: The APC angle is the opening angle of the butterfly
valve
between the vacuum chamber and the turbo pump.
It will affect the pressure in the chamber. Comparing the pressures during
etching
while running your different protocols should show it.
Greetings
Stefan

-----Original Message-----
From: [email protected] [mailto:mems-talk-
[email protected]] On Behalf Of [email protected]
Sent: Dienstag, 13. Januar 2004 07:29
To: General MEMS discussion
Subject: [mems-talk] APC angle in ICP process



Hi,
Am using an STS ICP Deep Reactive Ion Etcher. Have noticed that the APC angle
is slightly different in different protocols and this seems to affect the etch
outcome. Could I ask what is APC angle and how does it affect etch profile and
speed. Thanks.

Regards,
Melissa


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