Bijnens,

When I used KOH + IPA, I saw pyramids. The higher temperature, the more
pyramids. So I change my temperature from 85C to 80C.

Good Luck!

Lydia



Quoting Luc Bijnens :

> Dear Mems community
>
> I have observed a large number of 'pyramids' of Si remaining on the etched
> surface after anisotropic etching of 100 Si wafers with KOH.  Has anyone
> experienced this before? What could have caused this?
> Any help will be much appreciated
>
> L
> Kentron South Africa
>
>
>
>
>
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