Hello Tennyson:

Brewer Science manufactures a spin applied material (ProTEK TM) that can
withstand 30% KOH at 85C for over 8 hours.  It is not a polyimide, but
can be removed with acetone, plasma ashing, or thermal decomposition.
This material is used for front side protection during backside thinning
or v-groove processing.  You can obtain information on this material at
www.brewerscience.com/sm

Regards,

Mac Daily

tennyson nguty wrote:

>Dear MEMS-talk members,
>
>Can someone advice on polyimides resistant to KOH etching.
>
>Regards
>Dr. Tennyson Nguty
>Microsystems Technology Group, School of Engineering, University of
>Durham, South Road, Durham DH1 3LE.
>Tel:  0191 334 2525, Fax:     0191 334 2407
>
>_______________________________________________
>[email protected] mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/
>
>
>

--
Madison (Mac) Daily
MEMS Unit Manager
Specialty Materials Division
Brewer Science, Inc.
Tele:   573 364-0300
Fax:    573 458-4372