Hi Juntao,

Bake out your substrates for 5 minutes at 200 degrees C before spinning the
SU-8. SU-8 doesn't like water.

Good luck,
Ronald Dekker.

-----Original Message-----
From: Juntao Xu [mailto:[email protected]]
Sent: Tuesday, February 03, 2004 8:02 PM
To: [email protected]
Subject: [mems-talk] SU-8 adhension problem


Hi,

I use SU-8 (2000 series) to make multilever mould for PDMS microfludics. I
tried both silicon and glass as the substrate. The SU-8 exposure and
development are fine, the mould looks good. But when I peeled PDMS from the
mould, most of the SU-8 structure are peeled off with PDMS, the mould can't
be reused. It seems the adhension between SU-8 and the substrate is very
poor. Anyone could give me some suggestionon how to improve the adhesion? If

I need underexpose SU-8 to improve the adhension? Thanks!

Juntao

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