F-doped quarz glass will work fine (transmitts as deep as 157 nm).
I only know one company in Germany called SCHOTT, but search simply in
internet, there will be more of them since 193nm and 157nm are commonly
beeing used.

Josef Kouba
BESSY GmbH, AZM Group
Albert Einstein Str. 15
D-12489 Berlin
Tel.: +49-30-6392-3125
Fax: +49-30-6392-4682
email: [email protected]
www: www.azm.bessy.de







----- Original Message -----
From: "PEYRADE David" 
To: 
Sent: Wednesday, February 04, 2004 3:48 PM
Subject: [mems-talk] Glass substrate supplier


> Dear MEMS researchers,
>
> I am looking for 200mm or100mm glass substrate that transmit 80% of light
at
> 193nm.
> Does anyone know which kind of glass must be used ?
> Do you know a supplier for this kind of product ?
>
> Thanks a lot.
>
> ________________________
>
> David PEYRADE
>
> CNRS-LTM
> CEA LETI
> Bat.4120 p 220
> 17, rue des Martyrs
> 38054 Grenoble Cedex 9
> Bat4120 Pièce 204
> Tel:  33 (0)4 38 78 38 82
> Fax:  33 (0)4 38 78 58 92
> ________________________
>
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