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MEMSnet Home: MEMS-Talk: soi wafer
soi wafer
1997-02-28
Taechung Yi
soi wafer
Taechung Yi
1997-02-28
 Does any one have any information regarding SOI wafers that consists of
oxide thickness in excess of 2 micron and Si of 5-10 micron?

I would really appreciate any information.

Thank You

T.J
UCLA


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