Dear Joolien ,

3 um seems hard ...  I have the following spin-speed vs. thickness data from
Clariant AZ5214E (I hope it is same with AZ5214) data sheet :

2000 rpm 1.98 um
3000 1.62
4000 1.4
5000 1.25
6000 1.14

Best regards,

Oray Orkun Cellek
Research Assistant, Ph. D. Student
Electrical & Electronics Engineering Department
Middle East Technical University
06531 Ankara
Turkey
Tel : +90 312 210 4579
Fax : +90 312 210 1261
e-mail : [email protected]



----- Original Message -----
From: "Joolien Chee" 
To: 
Sent: Thursday, February 05, 2004 6:35 AM
Subject: [mems-talk] Help with AZ5214 Info


> Hi all,
> I am trying to spin AZ 5214 up to 3 microns or more thick. Is there are
> spin-time-thickness plot available for this PR?
> Thanks in advance.
>
> Joolien
>
>
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