-----Ursprüngliche Nachricht-----
Von: Stephan Biber 
An: [email protected] 
Datum: Friday, February 06, 2004 4:43 PM
Betreff: [mems-talk] metallization on high aspect ratio structures


>This shows that very narrow trenches can be coated with an aspect ratio of
up to 3:1. My goal is to coat the
> vertical sidewalls of the trenches with a 400-1000nm thick layer of gold.
This first test shows that an aspect ratio
> of 3:1 can be coated with gold very well.
>
> What would you think if the trench width is increased to 70µm and the
depth is 250µm? (aspect ratio=3.5:1) Do
> you think that it will be easier to coat a trench which has nearly the
same aspect ratio (3.5:1), but which is
> significantly wider (70µm)?

I think that it depends on the mean free path, and on the angular
distribution function of the incident gold atoms.