Dear mems members,
i am using SU-8.
Does anyone know what parameters in the fabrication process
might contribute to the quality of the surface roughness of Su-8?
Thanks in advance
Chen-han Lee
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Chen-Han Lee
Research Student
School of Manufacturing and Mechanical Engineering,
University of Birmingham,
Birmingham, B15 2TT
United Kingdom,
Phone : +44 121 4144245
Fax : +44 121 4143958
E-Mail : [email protected]
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