See my Ph.D. dissertation, Chapter 6, p. 161 at
http://www-bsac.eecs.berkeley.edu/archive/kirt_williams_phd.zip.
There is a plot of resistivity vs. sputtering pressure; it varied from 1 to
3 micro-ohm-meters.
    --Kirt Williams

----- Original Message -----
From: "Anna Ohlander" 
To: 
Sent: Wednesday, February 11, 2004 1:04 AM
Subject: [mems-talk] Ti thin film resistivity


> Hi,
>
> Does anyone know where i can find info on the behaviour of the thin film
> resistivity of Titanium.
> Been searching the litterature but haven't had much success.
>
> / Anna