I have used stainless steel as a substrate for SU-8 with good success.  The
SU-8 adhered well.  I didn't have a mirror finish though...in fact the
surface was relatively rough, which probably improved adhesion.

EB

----- Original Message -----
From: "Mark Leonard" 
To: 
Sent: Wednesday, February 11, 2004 2:58 AM
Subject: [mems-talk] Conductive substrates for processing SU-8


> Hello all,
>
> I am currently using the UV-LIGA process with SU-8 to fabricate metallic
MEMS devices as part of my PhD work. Since my devices are removed from the
substrate after fabrication I use the cheapest wafers possible, onto which I
deposit a conductive seed layer by chemical vapour deposition to form a
plating base. I was wondering if anyone has experience using a suitable
conductive substrate which cuts out the need to deposit the conductive seed
layer and hence save on processing time. I have noticed that SU-8 does not
adhere well to some surfaces such as copper. I have also noticed that
substrates which do not have a mirror finish result in poor quality
features, presumably because of scattering. It would be much appreciated if
anyone has any suggestions on potential conductive substrates that I can try
for my process.
>
>
> Mark
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