Anna:

Ideally the resistivity of titanium thin films  is a function of the
electron mean free path due to surface scattering when the film thickness
is under about four times the mean free path. Thicker films should approach
the bulk value of titanium.
However, film stress will also effect the mean free path and resistivity
due to the deposition conditions.
Unless titanium is deposited under very low vacuum levels there will also
be present titanium oxides and titanium nitride, affecting the
resistivity,  as titanium is an effective getter material.

allen


At 12:32 PM 2/12/04 +0100, you wrote:
>Hi again,
>
>I'm evaporating Titanium and search info on the resistivity vs thickness
>
>/Anna
>
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