HF does not etch gold, but it might etch the adhesion layer or underlying
substrate, causing it to peel off.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On
Behalf Of li Yu
Sent: Sunday, February 15, 2004 9:14 PM
To: [email protected]
Subject: [mems-talk] Does concentrated HF etch Au


I want to put a wafer with 2000A Au in 49% HF for 30 minute, Is that Ok?
Thanks in advance.
 Lili


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