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MEMSnet Home: MEMS-Talk: good process to manufacture vertical walls in Si
good process to manufacture vertical walls in Si
2004-02-15
Jörg Paschke
2004-02-17
Burkhard Volland
good process to manufacture vertical walls in Si
Jörg Paschke
2004-02-15
Hi,

I´m looking for a good RIE process to get vertical walls in Si with an
aluminium mask. Is there somebody who have experiences or some good
parameters to etch silicone.

Etching gases : SF6,CHF3,CF4,Ar,O2

Thanks in advance

___________________
best regards
Jörg Paschke
ICQ. 139350091
____________________________


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