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MEMSnet Home: MEMS-Talk: deep glass etching
deep glass etching
2004-02-14
Chen Yan
2004-02-17
lanzy
2004-02-16
[email protected]
2004-02-17
[email protected]
deep glass etching
[email protected]
2004-02-16
Chenyen:

What type of glass are you using? We have only had success only etching fused
silica or quartz. I have not found a good way to etch pyrex in plasma yet but I
keep trying. Bob Henderson


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