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MEMSnet Home: MEMS-Talk: deep glass etching
deep glass etching
2004-02-14
Chen Yan
2004-02-17
lanzy
2004-02-16
[email protected]
2004-02-17
[email protected]
deep glass etching
lanzy
2004-02-17
I am also trying to etch glass. It seems Cr film should work if the quality
of evaporation is good enough.

Best,
Lanzy

----- Original Message -----
From: "Chen Yan" 
To: 
Sent: Saturday, February 14, 2004 9:39 AM
Subject: [mems-talk] deep glass etching


Hi there,

I am trying to etch some deep channel (~100um) into glass using Cr as mask
using RIE, any one knows a recipe that can do the job? I am using SF6 and
CHF3 gas. Or can use wet etching? what chemical can I use and what mask is
the best for the etching?

Thank you for every help!

Best Regards,
chenyan





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