Hi all,
I use Karl Suss wafer bonder and I'd like to bond two Si wafer using on
the top wafer Au/Sn and on bottom Au.
Does anybody know a good recipe for this kind af sealing?
Thank you very much.
Bye

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Dr. Paolo Bondavalli
R&D MEMS Engineer
MICROTEC MEMS
THALES (ex THOMSON-CSF) CORPORATE RESEARCH CENTER
Domaine de Corbeville,
Route Departementale 128
F91404 ORSAY
(FRANCE)
Tel : 01 69 33 08 63
Fax : 01 69 33 08 62
Email : [email protected]
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