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MEMSnet Home: MEMS-Talk: HF mask
HF mask
2004-02-17
UNIX Pinguin
2004-02-18
yonghokim
2004-02-17
David Barrow
2004-02-17
Jan Lichtenberg (AMMT GmbH)
HF mask
David Barrow
2004-02-17
Dear Octavian

Some years ago we found that a thin-film of patterned SU8 worked out OK for a
quick photoanodic etch.
Cheers
David

-----------------------------------------------
Professor David Barrow
Laboratory for Applied Microsystems & NanoFAB
Cardiff School of Engineering
Cardiff University
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United Kingdom
Tel   +44(0)29 2087 5921 (Office)
Tel   +44(0)29 2087 4716 (Laboratory)
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E-m   [email protected]
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>>> [email protected] 17/02/04 12:04 PM >>>

 Hi,

 I need a mask to hold to HF.
 I need to porosify Si-wafers
(electrochemically in HF:ethanol,
 1:3 vol, currents up to 3 mA/cm2).
 Anybody any suggestion ?

 Many thanks,
 Octavian


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