Nickel in TMAH
*************

Guy,
    TMAH, because of its caustic nature will attack Aluminium (Nickel?), but
Aluminium erosion can be slowed down (mitigated) if you mix TMAH with a
certain amount of Silicon fragment additives [scavenger].

Nickel, I do not know. You will have to do some nickel etchrate experiments
and/ XPS to see the amount of oxidation.

Phil

----- Original Message -----
From: "Guy Haché" 
To: 
Sent: Tuesday, February 17, 2004 10:27 PM
Subject: [mems-talk] tmah solution: refresh and nickel


> Hi,
>
> I have achieved a 45 microns/hour Si etch rate with TMAH (thank's to all
your
> answers).
>
> In order to keep an etch rate over 30 microns/hour, when should I do
another
> TMAH solution?
>
> I would also like to know if the TMAH attacks Nickel?
>
> Thank's
>
>
> Guy Haché, M.Sc.A.
> Assistant de recherche, research assistant
> --------------------------------------------------------
> Département de génie électrique et de génie informatique
> Université de Sherbrooke
> 2500, boulevard Université
> Sherbrooke (Québec) Canada
> J1K 2R1
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