Hi Marie,

I think you can use also RIE (dry etch) for etching Silicon. I have used a
SF6, CHF3, O2 chemistry for etching Si with about 1 µm/min. Aluminium ist
not etched in my case but I don't know exactly about AlO or Al2O3.


Regards

Fabio Tagliareni


-----Ursprüngliche Nachricht-----
Von: [email protected]
[mailto:[email protected]]Im
Auftrag von Tripp, Marie Kathleen
Gesendet: Mittwoch, 18. Februar 2004 15:45
An: [email protected]
Betreff: [mems-talk] Alumina safe isotropic Silicon etchant


Hello,  I am looking for an etchant (either wet or dry) that will isotropic
etch Silicon but not affect Alumina (Al22O3, Alumina Oxide).  Can anyone
recommend anything other than XeF2?  Thanks, Marie

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