Hi everyone,
I am working on Az5214 photoresist. In order to model the lithography
process, I have to know a lot of modeling parameters like A,B,C,
diffusivity at different temperature, amplifying coefficient...
Unfortunately, I don't have all the facilities that is need to measure
those data. I am wondering if anyone knows anywhere I can get help from?
Thanks a lot!

Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716