Hi Guy,
I think your time of the etch process is important when considering the
effect of TMAH on Nickel. TMAH definitely etches nickel when etched over a
period of time ( say for more than a couple of hours).Even for a shorter
time, TMAH would cause considerable surface roughness. It all depends on
what you are using the nickel layer for.
Sreeram
> Hi,
>
> I have achieved a 45 microns/hour Si etch rate with TMAH (thank's to all
your
> answers).
>
> In order to keep an etch rate over 30 microns/hour, when should I do
another
> TMAH solution?
>
> I would also like to know if the TMAH attacks Nickel?
>
> Thank's
>
>
> Guy Haché, M.Sc.A.
> Assistant de recherche, research assistant
> --------------------------------------------------------
> Département de génie électrique et de génie informatique
> Université de Sherbrooke
> 2500, boulevard Université
> Sherbrooke (Québec) Canada
> J1K 2R1
> Téléphone/phone : (819) 821-8000 3706
> Télécopieur/fax : (819) 821-7937
> e-mail: [email protected]
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