Message-Id:   <[email protected]>

Dear MEMS colleagues

Does anyone work on the viscoelastic behavior of polysilicon beams at
high temperature?  Thanks for your help.



E. Yang
Institute of Industrial Science,
The Univ. of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan
TEL. +81-3-3402-6231(ext.2354), FAX. +81-3-3402-5078
E-mail    [email protected]
http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html