Hi Marie,

We have made some work on this subject using ICP reactor and SF6 chemistry:
http://cmi.epfl.ch/etch/MEMS03.pdf

Regards,
Cyrille.

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Tripp, Marie Kathleen
Sent: 18 February 2004 14:45
To: [email protected]
Subject: [mems-talk] Alumina safe isotropic Silicon etchant


Hello,  I am looking for an etchant (either wet or dry) that will isotropic
etch Silicon but not affect Alumina (Al22O3, Alumina Oxide).  Can anyone
recommend anything other than XeF2?  Thanks, Marie

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