Hello Pankaj,
You did not mention the method of deposition. Are you using thermal
evaporator, sputtering, e-beam. How thick is your polymer.?
Aasutosh Dave
>From: Pankaj Kaul
>Reply-To: [email protected], General MEMS discussion
>
>To: [email protected]
>Subject: [mems-talk] metal deposition on polymer/ aerogel
>Date: Thu, 19 Feb 2004 12:09:25 -0500
>
>Hi all,
>
>I'm facing problems in depositing Al 200nm or Au 200nm on Polymers and
>Aerogel samples.
>
>Can any anybody suggest me any technique / method for doing that.
>
>Thanks,
>Pankaj Kaul
>
>
>Department of Mechanical & Aerospace Engg
>Case Western Reserve University
>Euclid Avenue , Cleveland.
>
>
>
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