Hi, Daniel,

 I created the two separate numerical models in ANSYS: one for the
structural field and the other for electrostatic field. Then I combined
these two fields in P-SPICE by using electrical analogy. This design
methodology was published in JMEMS.
( " A Design Methodology for a Bulkmicromachined Two-Dimensional
Electrostatic Torsion Micromirror", Journal of Microelectromechanical
Systems, Vol. 12, No. 5, October 2003, pp. 692-701.)


Regards,

Julie

----- Original Message -----
From: "Daniel Shaw" 
To: "General MEMS discussion" 
Sent: Thursday, February 19, 2004 3:51 PM
Subject: RE: [mems-talk] ANSYS ESSOLV modelling ?


Souheil:

You just need to define a component of volumes that represent the air.  You
select those volumes and then use the CM command to define a component.

Regards.

Daniel Shaw: Technical Support Engineer
******************************************************

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
Sofiane ZAIRI
Sent: Monday, February 09, 2004 1:12 PM
To: [email protected]
Subject: [mems-talk] ANSYS ESSOLV modelling ?


Hi fellas,

Is there anyone, who had run already a coupled field " Electro-Structural "
analysis using ESSOLV macro under Ansys ?
My model is a basic MEMS swith, that needs to be solved in 3D.

I am familiar with the FEM modelling (meshing, loading, boundaries, etc). I
have created the Structural and the Electrostatic physics files, and I'm
stack with the air gap issue and how to declare the volume component for
morph region for example, etc

Please advise,

Souheil,

Many thanks



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