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How to remove carbon from Ta film
2004-02-21
Suhua Jiang
How to remove carbon from Ta film
Suhua Jiang
2004-02-21
Hi all,
I implanted C in Ta, but some C deposite on Ta, thickness is not constant
for different dose......
Is there any method to remove C from Ta, and also won't let implanted C come
out.
Thanks a lot

National Microanalysis Center
Materials Science Department
Fudan University
220# Handan Road
Shanghai, 200433
China
Tel: 86-21-65642380

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