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MEMSnet Home: MEMS-Talk: adhesion of oxide to evaprated chromium
adhesion of oxide to evaprated chromium
2004-02-21
Anna Ohlander
2004-02-23
JOHNSON,MARK (HP-Corvallis,ex1)
adhesion of oxide to evaprated chromium
JOHNSON,MARK (HP-Corvallis,ex1)
2004-02-23
Anna,

I think you will find that chromium does form an oxide.  There are several
references in the literature related to this, since it is used as a coating
metal for SEM.

Mark

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
Anna Ohlander
Sent: Saturday, February 21, 2004 10:26 AM
To: [email protected]
Subject: [mems-talk] adhesion of oxide to evaprated chromium


Hello,

Does anybody know anything about the adhesion of PECVD si oxide to
evaporated chromium? I've read that Chromium doesn't form a native oxide in
room temperature. What's the secret behind it's potential as an adhesion
layer?

/ Anna

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