Seems to me that a technique involving a transparent negative acting
chemically enhanced photoresist using several coating layers, coupled with
the electroplating of a suitable material like copper would be a way to go
Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.
-----Original Message-----
From: Eddie Blackwell [SMTP:[email protected]]
Sent: Thursday, February 19, 2004 4:42 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Metal posts with high aspect ratio
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