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MEMS
1997-02-07
Pennie Parker
1997-03-19
Ken Gonsalves
MEMS
Ken Gonsalves
1997-03-19
Hi!

I would appreciate any information on the use of polymers, especially
conducting polymers and optical polymers, in MEMS fabrication and applications?

Also are there any III-nitrides being fabricated as MEMS.

Thanks for the information

Ken


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