Hi Anthony,

17% HCL (and water) and room temperature should etch ITO at a rate of at
least 100A/min.  The HCL mixture will be selective to glass, and also safe
to have a photoresist pattern present.

- Justin

Justin C. Borski
MEMS Program Manager
Advanced MicroSensors Inc.
[email protected]


-----Original Message-----
From: Anthony [mailto:[email protected]]
Sent: Monday, February 23, 2004 8:33 AM
To: [email protected]
Subject: [email protected] - Email found in subject -
[mems-talk] ITO Etch selective to glass


I am looking for an etch that will remove Indium Tin Oxide (ITO) on a glass
lens without damage to the lens.  The ITO will need to be patterned. What
would be the best approach to do this?

Anthony Marrs
Intellite
[email protected]



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