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MEMSnet Home: MEMS-Talk: Re: Electrostatic Actuation....
Re: Electrostatic Actuation....
1995-09-22
[email protected]
Re: Electrostatic Actuation....
[email protected]
1995-09-22
MUMPs uses 500nm thick low stress LPCVD silicon nitride layer, but the design
rules recommend use of Poly0 (500nm) as an effective ground plane between the
nitride and structures built with the other poly layers.

- dave.


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