Hiroaki,
I have always used sputtered Cr/Au. Depending on glass thickness will
determine if you will get much or any under cutting.
Brent
Hiroaki SUZUKI wrote:
> Hi all
>
> Please allow me to ask one simple question. it might be in the past
> discussion...
> What is the best mask material for the glass etching with concentrated HF?
>
> Hiroaki
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/