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MEMSnet Home: MEMS-Talk: Mask for concentrated HF
Mask for concentrated HF
2004-02-24
Hiroaki SUZUKI
2004-02-24
Brent Garber (2 parts)
2004-02-25
Gert Eriksen
2004-02-26
Matthieu Gaudet
2004-02-27
Steven F. Nagle
Mask for concentrated HF
Brent Garber
2004-02-24
Hiroaki,

I have always used sputtered Cr/Au.  Depending on glass thickness will
determine if you will get much or any under cutting.

Brent

Hiroaki SUZUKI wrote:

> Hi all
>
> Please allow me to ask one simple question. it might be in the past
> discussion...
> What is the best mask material for the glass etching with concentrated HF?
>
> Hiroaki
>
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