Kristjan,  I am not sure that this will work but it is easy enough to try.
 Try coating the surface with a spin on coating of HMDS.  The organic side
could bond with the hydrophobic organic while the silicon side will oxidize
and possibly provide a hydrophilic surface for subsequent processing.  Hope
this helps.  Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Kristjan Leosson [SMTP:[email protected]]
Sent:   Tuesday, February 24, 2004 7:28 AM
To:     'General MEMS discussion'
Subject:        [mems-talk] Coating of hydrophobic polymer surface


I would like to know if there is a good method of coating a hydrophobic
(teflon-like) polymer surface with a thin layer (max few nm) of, e.g.,
monomer to make the surface hydrophilic and solvent-resistant for
subsequent lithographic processing.  Currently we are using
plasma-coating which works fine but spin-coating from a liquid solution
would be much more convenient.

Thanks

Kristjan Leosson
[email protected]



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