Dear Hiroaki,
You can also use sputtered poly silicon.
Regards,
Gert
> Hiroaki,
>
> I have always used sputtered Cr/Au. Depending on glass thickness will
> determine if you will get much or any under cutting.
>
> Brent
>
> Hiroaki SUZUKI wrote:
>
> > Hi all
> >
> > Please allow me to ask one simple question. it might be in the past
> > discussion... What is the best mask material for the glass etching
> > with concentrated HF?
> >
> > Hiroaki
> >
> > _______________________________________________
> > [email protected] mailing list: to unsubscribe or change your
> > list options, visit
> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by
> > the MEMS Exchange, providers of MEMS processing services. Visit us
> > at http://www.memsnet.org/
>