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MEMSnet Home: MEMS-Talk: Mask for concentrated HF
Mask for concentrated HF
2004-02-24
Hiroaki SUZUKI
2004-02-24
Brent Garber (2 parts)
2004-02-25
Gert Eriksen
2004-02-26
Matthieu Gaudet
2004-02-27
Steven F. Nagle
Mask for concentrated HF
Gert Eriksen
2004-02-25
Dear Hiroaki,

You can also use sputtered poly silicon.

Regards,
Gert


> Hiroaki,
>
> I have always used sputtered Cr/Au.  Depending on glass thickness will
> determine if you will get much or any under cutting.
>
> Brent
>
> Hiroaki SUZUKI wrote:
>
> > Hi all
> >
> > Please allow me to ask one simple question. it might be in the past
> > discussion... What is the best mask material for the glass etching
> > with concentrated HF?
> >
> > Hiroaki
> >
> > _______________________________________________
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