A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Aluminum Oxide etchant
Aluminum Oxide etchant
2004-02-26
Aamer Mahmood
2004-02-27
Neal Ricks
2004-02-27
Tripp, Marie Kathleen
2004-02-27
Greg Miller
Aluminum Oxide etchant
Greg Miller
2004-02-27
Aamer,

Check out this wedsite it should help you:  http://www.transene.com/



-----Original Message-----
From: Aamer Mahmood [mailto:[email protected]]
Sent: Thursday, February 26, 2004 11:09 AM
To: [email protected]
Subject: [mems-talk] Aluminum Oxide etchant


Hello everyone,This is my first post to the group.
I have searched this topic in the archives but haven't found a spot on
answer.
I need to sputter Aluminum Oxide on top of Spin on Glass and then
pattern and etch the Oxide.
What etchants can I use for the Aluminum Oxide etch?
Any particular masking materials or just the photoresist would do?
How does Aluminum Oxide react to CF4 (SOG etchant)?
Conversely, how does SOG react to the Aluminum Oxide etchant?
Any info on the selectivity of the etchants would also be helpful.
Regards.

Aamer Mahmood
Graduate Assistant
Microsensors lab
Department of Electrical Engineering
University of Texas at Arlington
Arlington TX 76019
email: [email protected]


_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Harrick Plasma, Inc.
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing