Aamer,

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-----Original Message-----
From: Aamer Mahmood [mailto:[email protected]]
Sent: Thursday, February 26, 2004 11:09 AM
To: [email protected]
Subject: [mems-talk] Aluminum Oxide etchant


Hello everyone,This is my first post to the group.
I have searched this topic in the archives but haven't found a spot on
answer.
I need to sputter Aluminum Oxide on top of Spin on Glass and then
pattern and etch the Oxide.
What etchants can I use for the Aluminum Oxide etch?
Any particular masking materials or just the photoresist would do?
How does Aluminum Oxide react to CF4 (SOG etchant)?
Conversely, how does SOG react to the Aluminum Oxide etchant?
Any info on the selectivity of the etchants would also be helpful.
Regards.

Aamer Mahmood
Graduate Assistant
Microsensors lab
Department of Electrical Engineering
University of Texas at Arlington
Arlington TX 76019
email: [email protected]


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