I also am trying to release cantiliver beams, what is your current process?
I was thinking of this method:
"The lab that I will be conducting the release is very rudimentary, but I
have the availability of HF to remove the SACOX holding the beam and TEOS
Hard Mask that remains on top of the Poly beam, however I am worried about
Stiction, or the beam collapsing If I were to dillute the HF with DI Water
following release and then either spin dry the wafer or dip the wafer in
Isopropyl alcohol (to rid the DI water and it's surface tension) followed by
placing the sample on a Hot plate rather quickly to rid the Alcohol. If
anyone has any thoughts on this propsed process or other tried methods that
might function in a basic lab setting for the release of the beams, it would
very much appreciated."
I ahve posted the above on the mems-talk site and am hoping to get a reply.
If you could tell me of your current process/method we could compare notes.
Regards,
Ryan Goodwin