A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: OCG resist
OCG resist
2004-02-27
asma waqar
2004-03-01
Michael D Martin
OCG resist
asma waqar
2004-02-27
Hi!
   I had to bond a pair of wafers using OCG thick resist. Deep RIE was done to
etch holes on the top wafer. Now that etching is done, I am unable to separate
the wafers. I have tried nanostrip & WNRD to remove OCG. But no success so far.
Any helpful suggestions would be appreciated.


---------------------------------
Do you Yahoo!?
Get better spam protection with Yahoo! Mail
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Tanner EDA by Mentor Graphics
Nano-Master, Inc.
Harrick Plasma, Inc.