A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Ti etchant
Ti etchant
2004-02-27
SLU
2004-02-29
Choe,S-H
2004-03-01
Mighty Platypus
2004-03-01
Antje
2004-03-01
aasutosh dave
Ti etchant
SLU
2004-02-27
Hello, everybody,

We're going to etch 500nm and 1um thick Ti film. It takes some time to buy
the pre-mixed etchant, so we are looking for some alternative acid etchant
that may be available in our lab, such as nitrid acid, or sulfric acid.
We'd
appreciate if  anybody can share such recipe with us.

lu



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
The Branford Group
Nano-Master, Inc.
Tanner EDA by Mentor Graphics