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MEMSnet Home: MEMS-Talk: Ti etchant
Ti etchant
2004-02-27
SLU
2004-02-29
Choe,S-H
2004-03-01
Mighty Platypus
2004-03-01
Antje
2004-03-01
aasutosh dave
Ti etchant
Choe,S-H
2004-02-29
Dear lu

Here is the etchant of titanium. Photoresist can be used by masking layer

HF + HNO3 + H2O
(1  :    1 :   50  )

Choe, S-H

Esashi Lab. Tohoku University
E-Mail: [email protected]



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