At 04:57 PM 3/1/2004 +0900, you wrote:
>Please help me!
>
>I want to etch the back side of silicon wafer using KOH solution without
damaging some devices on the front side of wafer.
>
>I got a little information there was a photoresist for protecting the
devices in case of etching the back side of the wafer. However, I couldn't
get the exact information  about the photoresist.
>
>As you know the photoresist or chemicals, please let me know it ASAP.
>

go to:
http://www.brewerscience.com/smproducts/sm_mems_protec.html

--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797