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MEMSnet Home: MEMS-Talk: Polymer film
Polymer film
1997-03-24
Arun Majumdar
Polymer film
Arun Majumdar
1997-03-24
I would like to coat a chip containing electronic devices
with a polymer film of uniform thickness.  However, I do
not want to spin coat and bake, but  would rather deposit
a film from its vapor. Does anyone know of a polymer that
can be deposited in such a way?

-- Arun Majumdar


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