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MEMSnet Home: MEMS-Talk: Etchant of Polysilicon
Etchant of Polysilicon
2004-03-01
aasutosh dave
Etchant of Polysilicon
aasutosh dave
2004-03-01
Hello,


    I need to know the etchant for polysilicon which is deposited above
silicon nitride. The other materials present are Ti and Gold. Is there any
etchant with the selectivity towards Si and the rest materials.


Thanks,

Aasutosh Dave

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