I use BOE. It works fine for me. We have to use aqua regia to etch ITO.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Facts are stubborn, but statistics are more pliable."
   -- Mark Twain

On Tue, 2 Mar 2004, jo ed wrote:

> Hello
>
> I have a substrate coated with ito followed by oxide.
> Does anyone know of a selective wet etch process to
> remove the oxide put keep the ito?
>
> cheers,
> Jo
>
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